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Web1 mei 2013 · Based on this data we optimized the etch process by adding 30 sccm of HBr in the TiN etch step (Ar/Cl 2 based plasma) and 15 sccm of HBr to the MoO x etch step (Cl 2 /O 2 based plasma), which is used only as OE to clean the eventual MoO x residues ( Fig. 7 ). Download : Download full-size image Fig. 7. Web5 okt. 2024 · We investigated the selective etching of Si versus Si1−xGex with various Ge concentrations (x = 0.13, 0.21, 0.30, 0.44) in tetramethyl ammonium hydroxide (TMAH) solution. Our results show that the Si1−xGex with a higher Ge concentration was etched slower due to the reduction in the Si(Ge)–OH bond. Owing to the difference in the …
Hr x-tech.cc
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WebElectrolytic Etching. Place the specimen immersed face up in the etching reagent. The cathode is placed approximately one inch from the specimen, and the anode is put in …
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